Proceedings of LPM2024

The 25th International Symposium on Laser Precision Microfabrication

June 11-14, 2024, San Sebastian, Spain

General Chair:

Yasuhiro Okamoto, Okayama University, Japan

Co-Chairs:

Santiago M. Olaizola Izquierdo, CEIT, Spain (Program Committee Chair)

Yongfeng Lu, University of Nebraska-Lincoln, USA

Michael Schmidt, Friedrich-Alexander-Universität Erlangen-Nurnberg, Germany

Mitsuhiro Terakawa, Keio University, Japan

Honorary Chairs:

Isamu Miyamoto, Osaka University, Japan

Koji Sugioka, RIKEN, Japan

Hiroyuki Niino, AIST, Japan

Paper number for quotation: #24-three digits number

For viewing the full text of each paper, please click “PDF”.

Password is required to open each PDF file.

The password has been sent to the attendees from LPM2024 Secretariat by e-mail.

Index

Papers from ORAL sessions (in presentation order)

#24-001 [PDF] Tu.1.B.3

Planar Light Valve (PLV) optical head for high throughput 10μm feature size laser processing

Gregory Jacob, Hirofumi Mizuno, Tianbo Liu, Alex Payne, and Lars Eng

Silicon Light Machines, USA

#24-002 [PDF] Tu.1.C.2

A novel modelling approach for simulating meltpool movement in laser based additive manufacturing

Khuldoon Usman*¹, Henrik Kruse², Markus Niessen³, Johannes Schleifenbaum², and Wolfgang Schulz^1,3

1- Chair of Nonlinear Dynamics in Laser Manufacturing Processes, RWTH Aachen University, Aachen, Germany

2- Chair of Digital Additive Production, RWTH Aachen University, Aachen, Germany

3- Fraunhofer Institute of Laser Technology, Aachen, Germany

#24-003 [PDF] Tu.1.C.3

Realizing the Potential of Physics-Informed Neural Network in Modelling Laser Drilling Process

Zahra Kheirandish^*1 and Wolfgang Schulz^{1, 2}

1- NLD, RWTH Aachen University, Aachen, Germany

2- Fraunhofer ILT, Aachen, Germany

#24-004 [PDF] Tu.2.B.4

Raman spectroscopy of pancreatic islet β cells in biomedical nanotechnology

Yan Li^1-4, Zuobin Wang^1-5, and Dayou Li^*1

1- JR3CN & IRAC, University of Bedfordshire, UK

2- International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, China

3- Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, China

4- Jilin Provincial Key Laboratory for Multi-information Nano Detection & Handling of Single Cells, Changchun University of Science and Technology, China

5- Changli Nano Biotechnology Ltd, China

#24-005 [PDF] W.1.A.2

AI-supported prediction of femtosecond laser micromachining parameters

Céline Petit ^*1, Nathanaël Mariaule², Sven Wauters², Arnaud de Decker², and David Bruneel¹

1- Lasea, Seraing, Belgium

2- SAGACIFY, Woluwe-Saint-Pierre, Belgium

#24-006 [PDF] W.1.A.3

Influence of the wavelength on femtosecond laser ablation thresholds and incubation coefficients of silicon, germanium and sapphire

Javier Prada-Rodrigo^*1, Yoan Di Maio², Nicola Faure¹, E. Kachan¹, J.P. Colombier¹ and Xxx Sedao¹

1- Laboratoire Hubert Curien, UMR CNRS 5516, Université Jean Monnet, Université de Lyon, Saint-Etienne, France

2- GIE Manutech-USD, 20 Rue Prof Benoit Lauras, Saint-Etienne, France

#24-007 [PDF] W.1.B.3

Single pulse ablation of different types of stainless steel: A comparison of pulse duration and the use of different burst modes

Dirk Obergfell^{1,2, *}, Bahman Azarhoushang², and Andrés Fabián Lasagni^2,3

1- Institute of Precision Machining (KSF), Furtwangen University, Tuttlingen, Germany

2- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

3- Fraunhofer Institut für Werkstoff- und Strahltechnik IWS, Dresden, Germany

#24-008 [PDF] W.1.C.3

Real-time monitoring of nanosecond Direct Laser Interference Patterning structure formation on stainless steel using time-resolved reflectivity

Ignacio Tabares^1*, Marcos Soldera¹, Bogdan Voisiat¹ and Andrés Fabián Lasagni^1,2

1- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

2- Fraunhofer Institute for Material and Beam Technology IWS, Dresden, Germany

#24-009 [PDF] W.2.A.4

Cu micropatterning using femtosecond laser pulse-induced Cu precipitation of Ag nanoparticles added glyoxylic acid Cu complex ink

Nam Phuong Ha¹, Huy Quang Tran¹, Tomoji Ohishi¹, and Mizue Mizoshiri^*2

1- Nagaoka University of Technology, Japan

2- Shibaura Institute of Technology, Japan

#24-010 [PDF] W.2.B.3

Femtosecond laser drilling of high-density micro-holes on metals using MHz burst mode

Themistoklis Karkantonis^*1, Etienne Pelletier¹, David Grant¹, and Dimitris Karnakis¹

1- Oxford Lasers Ltd, Unit 8 Moorbrook Park, Didcot OX11 7HP, United Kingdom

#24-011 [PDF] W.2.C.3

One-Step Replication of Microfluidic Polymer Films with selectively adjustable Wettability using UV-Imprinting

Eric Gärtner^*1, Fabian Wieland¹, Frederic Schell², Holger Schwarz³, Lukas Nitschke², Richard Chukwudi Okafor², Daniel Gitzel¹, Christoph Zwahr², and Thomas Seyller³

1- Fraunhofer Institute for Machine Tools and Forming Technology IWU, Chemnitz, Germany

2- Fraunhofer Institute for Material and Beam Science IWS, Dresden, Germany

3- Chemnitz University of Technology, Institute of Physics, Chemnitz, Germany

#24-012 [PDF] W.2.C.4

Surface functionalization without knowledge of surface topography and chemistry . a versatile approach

Alexander Wienke^*1, Shefna Shareef¹, Jürgen Koch¹, Peter Jäschke¹, and Stefan Kaierle^1,2

1- Laser Zentrum Hannover e.V., Hannover, Germany

2- Leibniz Universität Hannover, Institute of Transport and Automation Technology, Garbsen, Germany

#24-013 [PDF] Invited paper, Th.1.B.1

Unveiling the European Journey: Advancements in Laser Technology through Laser4Fun, LAMpAS, and CLASCO projects

Andrés Fabián Lasagni^1,2* and Marcos Soldera¹

1- Institute of Manufacturing Science and Engineering, Technische Universität Dresden, Germany

2- Fraunhofer Institut für Werkstoff und Strahltechnik IWS, Dresden, Germany

#24-014 [PDF] Th.1.B.5

A durable superhydrophobic hierarchical surface structure fabricated by ultrafast laser processing

J. Radhakrishnan^*1, P. Butler-Smith¹, H. Zhang², and F. Xu²

1- The Manufacturing Technology Centre, Coventry CV7 9JU, United Kingdom.

2- The University of Nottingham, Department of Mechanical Materials and Manufacturing Engineering, University Park, Nottingham NG7 2RD, United Kingdom

#24-015 [PDF] Th.1.D.3

Monitoring of femtosecond laser micromachining using ultra-high speed photodiodes: the effect of feature depth on the optical process emission

Kerim Yildirim^*1, Balasubramanian Nagarajan¹, Tegoeh Tjahjowidodo², and Sylvie Castagne¹

1KU Leuven, Department of Mechanical Engineering and Flanders Make@KU Leuven-M&A, Celestijnenlaan 300, 3001 Leuven, Belgium

2KU Leuven, Department of Mechanical Engineering, Jan Pieter de Nayerlaan 5, 2860, Sint-Katelijne-Waver, Belgium

#24-016 [PDF] Th.1.D.4

Synchrotron X-ray imaging of the formation of geometry deviations during percussion laser drilling with ultrashort pulses

Lukas Schnelle^r*1,2, Manuel Henn¹, Christoph Spurk³, Alexander Olowinsky⁴, Felix Beckmann⁵, Julian Moosmann⁵, Daniel Holder¹, Christian Hagenlocher¹, and Thomas Graf¹

1- Institut für Strahlwerkzeuge IFSW, University Stuttgart, Stuttgart Germany

2- Graduate School of Excellence advanced Manufacturing Engineering (GSaME) Stuttgart Germany

3- Chair for Laser Technology LLT, RWTH Aachen University, Aachen, Ger-many

4- Fraunhofer-Institute for Laser Technology ILT, Aachen, Germany

5- Institute of Materials Physics, Helmholtz-Zentrum Hereon, Geesthacht, Germany

#24-017 [PDF] Th.1.D.5

Acoustic trilateration monitoring for laser surface processing monitoring

Clovis Alleaume^1*, Iago Camaño Lagoa¹, Camilo Prieto Río¹, Sara Vidal Álvarez¹, and Jaime Cuartero Del Pozo¹

1- AIMEN Centro Tecnológico – O Porriño, Spain

#24-018 [PDF] Th.2.A.2

Fabrication of photonic crystal structures by single pulse laser interference Lithography

Zhiheng Lin¹, Yaoxun Wang¹, Yun-Ran Wang¹, Im Sik Han¹, and Mark Hopkinson^*1

1- Department of Electronic and Electrical Engineering, University of Sheffield. North Campus, Broad Lane. Sheffield. S3 7HQ. United Kingdom

#24-019 [PDF] Th.2.A.4

Study on ablation mechanism during laser cutting of alumina-based ceramics

Quan Tang^{*, 1, 2}, Mengyu Liu^1-3, Lunzhen Hu^{1, 2}, Yuqiang Hou^{1, 2}, Hao Zhang⁴, Gensheng Zha⁵, Andreas Ostendorf^1,6 and Qingchuan Guo^*,1-3

1- Center for Laser and Optics, Green Industry Innovation Research Institute, Anhui University, Hefei, China

2- Research and Development Center, Anhui Boyi Laser Technology Co., Ltd, Hefei, China

3- Information Materials and Intelligent Sensing Laboratory of Anhui Province, Anhui University, Hefei, China

4- School of civilaviation, Northwestern Polytechnical University, Xi'an, China

5- Research and Development Center, Anhui HuachuangHongdu Optoelectronic Technology Company, Hefei, China

6- Applied Laser Technology, RuhrUniversität Bochum, Germany

#24-020 [PDF] Th.3.B.2

Toward taper-free structures in ultrashort pulse laser ablation using liquid crystal spatial light modulators

Martin Osbild^*1, Mario Hesker², Moritz Battermann¹, Gang Lu¹, and Dennis Haasler¹

1- Fraunhofer Institute for Laser Technology ILT, Germany

2- RWTH Aachen University, Chair for Technology of Optical Systems TOS, Germany

#24-021 [PDF] Th.3.B.3

Spatially resolved fluence measurement for arbitrary laser beam shapes

Moritz Battermann^*1, Martin Osbild¹, and Paul Buske^*2

1- Fraunhofer Institute for Laser Technology ILT, Germany

2- RWTH Aachen University, Chair for Technology of Optical Systems TOS, Germany

#24-022 [PDF] Th.3.C.3

Using Laser in the Fabrication of Graphene for Gas Sensing: A Digital Twin Approach

José Carlos Santos-Ceballos¹, FoadSalehnia^*1, Alfonso Romero¹, and Xavier Vilanova¹

1- Universitat Rovira i Virgili, Microsystems Nanotechnologies for Chemical Analysis (MINOS), Tarragona, Spain

#24-023 [PDF] Th.3.D.3　

Enhanced Flexibility in Direct Laser Interference Patterning through Industrial Robot Integration

L. Olawsky^1,2*, S. Moghtaderifard², R. Baumann², D. Li³, C. Kuhn¹, K. Du³, M. Soldera², and A. F. Lasagni^2,4

1- ALOtec Dresden GmbH, Kesselsdorf, Germany

2- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

3- EdgeWave GmbH, Würselen, Germany

4- Fraunhofer- Institut für Werkstoff- und Strahltechnik IWS, Dresden, Germany

#24-024 [PDF] Th.3.D.4

Influence of laser micropatterning on the mechanical strength of dental grade zirconia

Douglas Fabris¹, Andrés F. Lasagni^2,3, Márcio C. Fredel¹, and Bruno Henriques^*1,4

1- Ceramic and Composite Materials Research Group (CERMAT), Federal University of Santa Ca-tarina, Brazil

2- Institute for Manufacturing Technology, Technische Universität Dresden, Germany

3- Fraunhofer Institute for Material and Beam Technology IWS, Dresden, Germany

4- Center for Micro-Electro Mechanical Systems (CMEMS-UMinho), University of Minho, Portugal

#24-025 [PDF] Th.4.B.1

High speed and precision cutting of thin glass with ultra-fast asymmetric Bessel-like beams

Lunzhen Hu^1,2, Quan Tang^1,2, Yetao Liu¹, Yuqiang Hou¹, Hao Zhang³, Evgeny L Gurevich^1,4, and Qingchuan Guo^*1,2

1- Center for Lasers and Optics, Green Industry Innovation Research Institute, Anhui University, Hefei, PR China

2- Information Materials and Intelligent Sensing Laboratory of Anhui Province, Anhui University, Hefei, PR China

3- School of Civil aviation, Northwestern Polytechnical University, Xian, 710072, PR China

4- Laser Center (LFM), University of Applied Sciences Münster, Steinfurt, Germany

#24-026 [PDF] Th.4.B.2

Single-and multi-beam drilling of thin titanium foils by femtosecond laser ablation in liquids

Philipp L. Maack*, Cemal Esen, and Andreas Ostendorf

Applied Laser Technologies, Ruhr University Bochum, Germany

#24-027 [PDF] Th.4.D.3

Pushing the Boundaries: 1 kW Fiber Laser-Driven Direct Laser Interference Patterning Technique

Bogdan Voisiat¹, Wei Wang², Dominik Britz², and Andrés Fabian Lasagni^1,3

1- Institute of Manufacturing Science and Engineering, Technische Universität Dresden, Germany

2- SurFunction GmbH, Campus StarterzentrumGebäude A1.1, Saarbrücken, Germany

3- Fraunhofer Institute for Material and Beam Technology IWS, Dresden, Germany

#24-028 [PDF] F.1.A.3

Surface quality assessment in femtosecond laser micromachining of glass under different ambient media

Harish Chandra and Deepak Marla*

Department of Mechanical Engineering, Indian Institute of Technology Bombay, Mumbai, India

#24-029 [ PDF] F.1.B.4

Laser grooving of Copper for Microelectronics

Benjamin Bernard¹, Yohei Kaneko², Shohei Matsushita², and Hitoshi Hoshino¹

1- DISCO HI-TEC Europe GmbH, Kirchheim b. Muenchen, Germany

2- DISCO Corporation, Ota-ku, 1438580 Tokyo, Japan

#24-030 [ PDF] F.2.A.5

Through glass via drilling using GHz-bursts of femtosecond pulses: challenges and implementation

Pierre Balage^*1, John Lopez¹, Theo Guilberteau^1,2, Manon Lafargue^1,3, Guillaume Bonamis³, Clemens Honninger³, and Inka-Manek-Honninger^1*

1- University of Bordeaux-CNRS-CEA, CELIA UMR5107, Talence, France

2- ALPhANOV, Talence, France

3- AMPLITUDE, Pessac, France

#24-031 [PDF] F.2.C.2

In situ X-ray phase contrast imaging of humping formation during laser welding of 316L stainless steel

Elie Haddad^*1, Marie-Cathrin. Lach^2,3, Christoph Spurk³, Marc Hummel³, André Häusler¹, Alexander Olowinsky¹, Felix Beckmann⁴, and Julian Moosmann⁴

1- Fraunhofer Institute for Laser Technology ILT, Aachen, Germany

2- FH Aachen - University of Applied Sciences, Aachen Germany

3- Chair of Laser Technology LLT, RWTH Aachen University, Aachen, Germany

4- Institute of Materials Physics, Helmholtz-Zentrum Hereon, Geesthacht, Germany

#24-032 [PDF] F.2.C.3

Probe-beam deflection diagnostic of shock waves generated during Direct Laser Inference Patterning

Tobias Steege^*1, Clarita Muntschick¹, Christoph Zwahr¹ and Andres F. Lasagni^1,2

1- Fraunhofer Institute for Material and Beam Technology IWS, Dresden, Germany

2- TechnischeUniversitat Dresden, Institut fur Fertigungstechnik, Germany

#24-033 [PDF] F.2.C.4

Hide and Seek: Using masked vision transformer to detect surface structures on laser polished metals

Julius Neuß and Sven Linden

Fraunhofer Institute for Laser Technology ILT, Germany

#24-034 [PDF] F.2.C.5

In-situ monitoring of interface status and ablation depth in ultrafast laser drilling of heterogeneous material

Tao Sun^1,2, Wanqin Zhao^*1,2, Zhengjie Fan^1,2, Jinge He^1,2, Jianlei Cui^1,2, and Xuesong Mei^1,2

1- School of Mechanical Engineering, Xi’an Jiaotong University, China

2- State Key Laboratory for Precision Micro-Nano Manufacturing Technologies, Xi'an Jiaotong Uni-versity, China

Papers from Poster Presentations (in presentation order)

#24-035 [PDF] Poster 05

Analysis of temporal changes in temperature distribution at a laser spot in the Selective Laser Thermoregulation system measured by a high-speed radiation thermometer

Shuta Kanai¹, Tomomasa Ohkubo^*1, Shota Ui¹, Yusaku Kawarazaki¹, Eiichi Matsunaga¹, Ken Goto², and Yutaka Kagawa¹

1- Tokyo University of Technology, Japan

2- Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, Japan

#24-036 [PDF] Poster 08

Direct Laser Interference Patterning of zirconia using nano-and picosecond laser

Douglas Fabris¹, Andrés F. Lasagni^2,3, Márcio C. Fredel¹, and Bruno Henriques^*1,4

1- Ceramic and Composite Materials Research Group (CERMAT), Federal University of Santa Catarina, Brazil

2- Institute for Manufacturing Technology, Technische Universität Dresden, Germany

3- Fraunhofer Institute for Material and Beam Technology IWS, Dresden, Germany

4- Center for Micro-Electro Mechanical Systems (CMEMS-UMinho), University of Minho, Portugal

#24-037 [PDF] Poster 14

Optical monitoring of periodical structure formation on light metals during a single laser pulse in the nanosecond regime

Ignacio Tabares^1*, Marcos Soldera¹, Bogdan Voisiat¹ and Andrés Fabián Lasagni^1,2

1- Institute for Manufacturing Technology, Technische Universität Dresden, Germany

2- Fraunhofer Institute for Material and Beam Technology IWS, Dresden, Germany

#24-038 [PDF] Poster 18

Formation of femtosecond laser induced periodic surface structures on medical polymer for control of cell behaviour

Keisuke Takenaka^*1, Peng Chen², Yuji Sato¹, and Masahiro Tsukmaoto¹

1- Joining and Welding Research Institute, Osaka University, Japan

2- Graduate School of Dentistry, Tohoku University, Japan

#24-039 [PDF] Poster 19

Fabrication of foamed GO-hydrogel nanocomposite surfaces using 532 nm laser radiation

Lucinda Mulko¹, Emma Cuello², Robert Baumann², Anthony Ramuglia³, Inez Weidinger³, Diego Acevedo², Cesar A Barbero², María Molina², and Andrés Fabián Lasagni^1,3*

1- Institute of Manufacturing Science and Engineering, Technische Universität Dresden, Germany

2- Research Institute for Energy Tech. and Adv. Mat. (IITEMA), National University of Río Cuarto (UNRC), Río Cuarto, Argentina

3- FakultätChemie und Lebensmittelchemie, Technische Universität Dresden, Dresden, Germany

4- Fraunhofer Institut für Werkstoff und Strahltechnik IWS, Dresden, Germany

#24-040 [PDF] Poster 26

Prediction of Wetting Behaviours of Femtosecond Laser Texturized Surfaces

Ilemona Sunday Omeje^*1, Javier Prada-Rodrigo¹, Emilie Gamet¹, Yoan Di Maio², Raphaël Guillemet³, Tatiana Itina¹ and Xxx Sedao²

1- Laboratoire Hubert Curien, UMR CNRS 5516, Université Jean Monnet, Université de Lyon, Saint-Etienne, France

2- GIE Manutech-USD, 20 Rue Prof Benoit Lauras, Saint-Etienne, France

3- Technologies & Materials Research Group, Palaiseaucedex, France

#24-041 [PDF] Poster 30

Fourier Analysis with Gini Coefficient: A New Approach to Assess Surface Topography in Direct Laser Interference Patterning

Wei Wang^1*, Bogdan Voisiat^1,2, Dominik Britz^1,3,4, Marcos Soldera², Marcelo Daniel Sallese² and Andrés Fabián Lasagni^2,5

1- SurFunction GmbH, Campus StarterzentrumGebäude A1.1, Germany

2- Institut für Fertigungstechnik, Technische Universität Dresden, Germany

3- Department of Materials Science, Saarland University, Germany

4- Material Engineering Center Saarland, Germany

5- Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, Germany